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Fri. Sep 20th, 2024
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China’s SMEE files patent for an EUV chipmaking tool — tool aims to break the shackles of ASML export restrictions

By Sep 13, 2024

Shanghai Microelectronics Equipment patents key components of an EUV lithography tool. 

Shanghai Microelectronics Equipment patents key components of an EUV lithography tool. 

By

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